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广州嘉铭专业供应日本KOHZU神津精机断层面计测系统
Layer Profiling System
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction.
Features
Super depty measurement
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays.
Vevy weak interference fringe patterns can be capured
Since our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognizied, foreign particle locations in multilayer film can be identified.
100 magnification interference is achieved
A Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult.
NSIMAGIK compatible system
NSIMAGIK specifications common to various image creation systems and image processing system are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible.
Specifications of stage
Item | RSY-150 | RSY-300 |
Compressed Air | ≧0.5Mpa | |
Tube: Internal diameter 4mm, External diameter 6mm | ||
Power Saurce | Single-phase 100V 4KVA | |
Clean Room Response | Response to Class 1000 | |
Stage Unit Size | 600(W)×500(D)×1400(H) | 1200(W)×800(D)×1500(H) |
Stage Unit Weight | about 200kg | about 300kg |
Control Rack Unit Size | 570(W)×750(D)×1850(H) | 5700(W)×750(D)×1850(H) |
Control Rack Unit Weight | about 180kg | |
X-Y Stage |
| |
X Valid Stroke | ±75mm | ±150mm |
Y Valid Stroke | ±75mm | ±150mm |
Maximum Speed | 10mm/sec | |
Actuator | Ball screw, Open-loop control | |
Stage Resolution | 1μm/step | |
Repeatability | ±1μm | |
Z axis |
| |
Valid Stroke | ±50mm | |
Actuator | Grand screw, Open-loop control | |
Z Axis Resolution | ±1μm/step (Half-step) | |
Jog-Dial | 100μm/Revolution | |
Joy-Stick | Hi-speed setting: 80000pps, Low-speed setting: 200pps | |
日本神津精机中国总代理：
广州市嘉铭工业自动化技术有限公司
地 址：广州市广州大道中明月一路20号明月阁
电 话：+86 020-87361761 传真：87361189
E-mail:sales@kmischina.com